Optimization of oxygen on Nb-doped TiO2 using DC and RF magnetron sputtering using composite and metal target Conference Paper

http://dx.doi.org/10.1063/1.4968365

authors

Abdullah, S. A.
Sahdan, M. Z.
Nafarizal, N.
Adriyanto, F.
Saim, H.
Mohd Tawil, Siti Nooraya
Bakri, A. S.

publication date

2017

published in

AIP Conference Proceedings Journal

Digital Object Identifier (DOI)

https://doi.org/10.1063/1.4968365

start page

030112

volume

1788