Analysis on Mechanical Property for Varied Geometry and Structure Parameters of Silicon Based Filtration Membrane for Artificial Kidney

Silicon and Silicon Nitride are vigorously utilized and explored in micro and nano fabrication technology as they have excellent mechanical and electrical characteristics suitable for NEMS device application. In this study, both of them are analyzed using COMSOL Multiphysics software to evaluate the strength capability of the material when used as filtration membrane in artificial kidney. The artificial filtration membrane is a crucial part in an artificial kidney system as it functions to filter out all wastes from blood stream. This paper investigates the effect of membrane thickness experiencing applied pressure of 1332.3 Pa and 7332.7 Pa on membrane deflection and von Mises stress at the center of the filtration membrane. Those mechanical characteristics at different pore geometry and structure are evaluated against applied pressure on the filtration membrane surface. The results show that the pore geometry and shape for a membrane with thickness of higher than 200 nm will not have significant influences on the deflection and stress characteristics. Therefore, thicker membrane will result to a more stable filtration process that would be able to withstand simulated blood stream pressure in an artificial kidney.

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